X-ray Photoelectron Spectroscopy (XPS)

X-ray Photoelectron Spectroscopy (XPS)

The interior of the NAP-XPS XPS chamber (left) and the exterior view (right)

UHV System 1

  • Specs Phoibos 100 electron energy analyser
    • Acceptance angle: ± 15°
    • Kinetic energy range: 0 - 3500 eV
    • Pass energies: 0 - 550 eV, continuously adjustable
  • MCD 5 channel Detector
  • Specs XR50 Al/Mg X-ray source
  • Other coupled techniques see here

UHV System 2

  • Specs Phoibos 150 electron energy analyser
    • Acceptance angle: ± 15°
    • Kinetic energy range: 0 - 3500 eV
    • Pass energies: 0 - 550 eV, continuously adjustable
    • Energy resolution: < 10 meV
  • MCD 9 9-channel detector
  • Specs XR50 M Al/Mg monochromated X-ray source (Focus 500 monochromator)
  • Specs FG 20 electron flood gun
  • Specs Low Energy Ion Spectroscopy (LEIS), Helium-ion source
  • Other coupled instruments see here

UHV System 3

  • Specs XR 50M Al Kα X-ray source, with Specs FOCUS 600 ellipsoidal monochromator
  • Specs Phoibos 100/150 hemispherical electron energy analyser
  • Specs FG 15/40 flood gun to compansate for insulator sample charging
  • Sample preparation chamber: one 3-pocket e-beam evaporator, one 3-pocket evaporator
  • Other coupled instruments see here

UHV System 4

  • Specs Phoibos 100 electron energy analyser
  • MCD 5 channel Detector
  • Specs XR50 monochromated Al/Mg X-ray source
  • Specs FG 15/40 flood gun
  • Specs Low Energy Ion Spectroscopy (LEIS): Helium ion source
  • Other coupled instruments see here

UHV System 6

  • Omicron EA125 XPS analyzer (7 channeltrons)
  • Omicron DAR400 Mg/Al X-ray source
  • Sputter gun sample preparation
  • For details of other coupled techniques, see here
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