Scanning Electron Microscopes (SEM)
Thermo Scientific Apreo SEM
- Source
- (FEG)
- Detectors
- Secondary Electron (SE) compound lens
- Backscattered Electron (BSE) compound lens
- UltraDry Energy Dispersive X-ray Spectroscopy (EDX)
- Electron Backscattered Diffraction (EBSD): crystallographic analysis (EBSD)
- High and Low Vacuum modes
- Low vacuum mode: 500 Pa maximum chamber pressure
- High Resolution SEM
- High Vacuum Mode: 0.7 nm
- Low Vacuum Mode: 1.2 nm
- Heating stage for in situ observation of sample changes
Hitachi S-3400N
- Variable Pressure (VP) mode availalbe
- Allows microscopic characterization of wet and non-conductive samples
- High Resolution SEM
- High Vacuum Mode: 3 nm
- VP Mode: 4 nm