The Advanced Research Center for NanoLithography: better chips-making-tools using fundamental physics research.

ARCNL in Amsterdam started in 2014 upon an initiative of ASML. ARCNL focuses on fundamental physics and to some extent chemistry in the context of technologies for nanolithography, primarily for the semiconductor industry. As ASML is making the “most complex machines ever made my mankind”, the challenges for physics and chemistry are comparably enormous. In this talk aspects of ASML’s advanced tools are reflected against the ARCNL science program including some highlights. ARCNL as a public-private partnership in the academics landscape not only shortens the distance between proof-of-concept and introduction in a development cycle but also provides a stage for exciting physics.