Equipment

Electron microcopy group

 

 

JEOL JEM-ARM200F

 

• Probe and image Cs corrector
• cold field emission gun
• acceleration voltages: 80, 200 kV
• point resolution: 1.1 Å TEM
• point resolution: 0.8 Å STEM
• Energy Dispersive X-ray detector
• Gatan Imaging Filter (Quantum)
• Gatan UltraScan 4000 Camera
• HAADF, ADF, ABF, BF

 

 

 

 

 

 

 

 

 

FEI Talos F200X

 

• XFEG field emission gun
• acceleration voltage: 200 kV
• Information limit TEM: 1.2 Å
• point resolution STEM: 1.6 Å
• FEI Ceta 16M CMOS camera
• BF, 2 DF, HAADF detectors
• SuperX 4 SDD EDX detectors, 0.9 sr
• EDX energy resolution: 130 eV
• TEM & STEM tomography

 

FEI TITAN 80-300

 

• Cs corrector
• Field Emission Gun
• acceleration voltages 80, 200, 300 kV
• point resolution: 0.8 Å TEM
• point resolution: 1.34 Å STEM
• Energy Dispersive X-ray detector
• Gatan Imaging Filter (Tridiem)
• HAADF

 

 

 

 

 

 

Hitachi S4800

 

• cold Field Emission Gun
• acceleration voltages from 0.1 kV to 30 kV
• max. resolution: 1.4 nm at 1 kV; 1.0 nm at 15 kV
• Secondary Electron detector (upper/lower)
• Back Scattered Electron detector (YAG)
• Scanning Transmission Electron Microscopy detector
• Energy Dispersive X-ray detector (Genesis 4000)

 

 

FEI FIB/SEM DualBeam Helios NanoLab G3 UC

• SEM
• Schottky thermal field emitter
• UC technology (monochromator) at low energies
• Acceleration voltage: 0.35 - 30 kV
• E-beam current: 0.8 pA up to 100 nA
• 5x SE and BSE detectors
• Retractable STEM detector
• High performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE)
• Max. electron beam resolution @ optimum WD and 15 kV: 0.6 nm
• QuickLok ambient temperature airlock for vacuum transfer


• FIB
• Gallium ion source
• Acceleration voltage: 0.5 - 30 kV
• Ion beam current: 0.1 pA up to 65 nA
• Ion beam resolution @ coincident point and 30 kV: 4.0 nm
• GIS (Gas Injection System): C and Pt deposition
• EasyLift™ In situ lift-out micromanipulator

FEI Quanta 200 FEG

 

 

• hot Field Emission Gun
• acceleration voltages from 0.5 kV to 30 kV
• max. resolution: 1.4 nm
• Secondary Electron detector
• Back Scattered Electron detector (SSD)
• Scanning Transmission Electron Microscopy detector
• Energy Dispersive X-ray detector (Genesis 4000)
• Cathodo Luminescence detector
• in-situ SEM in gas atmoresphere
• two heating stages (up to 1000°C and 1500°C)
• mass flow controller (N₂, O₂, H₂, CO, C₂H₄, H₂O,
  NH₃ …)
• three imaging modes - high vacuum, low vacuum (0.1~2 mbar) and ESEM (up to 30 mbar)
• gaseous SE and BSE detectors

XRF X-ray Florescence Spectrometer Pioneer S4 (Bruker)

• Elemental quantification with/without Standards
• 4 kW equipment performance
• Rh – Target

Preparation

Equipment:

• Ion beam etching device
• PIPS 691 (2x)
• RES 101
• Fischione 1010
• Grinding devices
• Diamant saw (2x)
• Dimple grinder (2x)
• Ultra microtome PowerTome X
• Zeiss optical microscope AxioTech
• Melting device (Vulcan 2)
• Sputter/Coater (Cressington)
• Edwards Auto 306 coating device
• Fischione plasm cleaner
• Binder plasm cleaner

Methods:

• Cross section
• Plan view
• Slope cutting
• Ion beam etching
• Sample melting (XRF)

STOE STADI P transmission diffractometer

• Cu anode
• Primary Ge(111) monochromator
• Dectris MYTHEN 1K position sensitve microstrip solid-state detector
• Auto sampler

Bruker D8 Advance II Bragg-Brentano Theta/Theta diffractometer

• Cu anode
• Ni filter
• LynxEye position sensitve microstrip solid-state detector

Bruker D8 Advance Davinci Theta/Theta diffractometer

• Parallel beam geometry
• Cu anode
• Ni filter
• LynxEye position sensitve microstrip solid-state detector
• Compact Eulerian cradle or motorized xyz sample stage

STOE Bragg-Brentano Theta/Theta diffractometer (in-situ setup)

• Cu anode
• Secondary graphite monochromator & scintillation detector
• Alternatively: Ni filter & Dectris MYTHEN 1K position sensitve microstrip solid-state detector
• Anton Paar XRK900 high-temperature diffraction chamber
• Gas supply system with Bronkhorst mass flow controllers
• Online gas analysis with Pfeiffer OmniStar quadrupole mass spectrometer