Methods

Electron Microscopy group

We cover a broad range of magnifications ranging from optical microscopy over scanning electron microscopy (SEM) and state of the art aberration corrected scanning transmission electron microscopy (STEM) down to sub angstrom resolution imaging using transmission electron microscopy (TEM). Information on the average structure is obtained from detailed X-ray diffraction (XRD) analysis. Structural information is complemented with information about the elemental composition which is acquired using energy dispersive X-ray (EDX) spectroscopy. Electron energy loss spectrometry (EELS) is used to provide further details about the elemental composition and electronic structure.

TEM

TEM

TEM

  • high resolution imaging
  • selected area electron diffraction
  • bright field/dark field imaging

 

STEM

STEM

 
  • HAADF/ADF/ABF/BF imaging
  • elemental mapping
  • fast scanning of focused electron probe

 

EDX

EDX

  • spatially resolved compositional analysis
  • qualitative and quantitative elemental analysis
  • point scan/line scan/elemental mapping

 

EELS

EELS

  • spatially resolved compositional and electronic structure analysis
  • point scan/line scan/elemental mapping
  • complementary to NEXAFS

 

FIB

FIB

  • TEM sample preparation
  • Nanofabrication and nanostructuring
  • Focused electron/ion beam induced deposition (C, SiO2, Pt)

 

SEM

SEM

  • Low voltage imaging
  • Surface sensitive
  • Morphological homogeneity

 

Sample preparation for Light Microscope, SEM, TEM, XRF

Sample preparation for Light Microscope, SEM, TEM, XRF

  • Separating:
    • Diamond wire saw
    • Diamond wheel saw
    • Ultramicrotome
  • Grinding:
    • Grinding and polishing machine
    • Dimple grinder
  • Ion beam thinning

 

XRD

XRD

  • Transmission and Bragg-Brentano
  • Grazing incidence XRD and X-ray reflectometry
  • Rietveld refinement
  • Operando measurements for powder and thin films

 

Equipment

JEOL ARM-200F

JEOL ARM-200F

  • Probe and image Cs corrector
  • cold field emission gun
  • acceleration voltages: 80, 200 kV
  • point resolution: 1.1 Å TEM
  • point resolution: 0.8 Å STEM
  • Energy Dispersive X-ray detector
  • Gatan Imaging Filter (Quantum)
  • Gatan Oneview Camera

FEI Talos F200X

FEI Talos F200X

  • XFEG field emission gun
  • acceleration voltage: 200 kV
  • Information limit TEM: 1.2 Å
  • point resolution STEM: 1.6 Å
  • FEI Ceta 16M CMOS camera
  • BF, 2 DF, HAADF detectors
  • SuperX 4 SDD EDX detectors, 0.9 sr
  • EDX energy resolution: 130 eV
  • TEM & STEM tomography

FEI FIB/SEM DualBeam Helios NanoLab G3 UC

FEI FIB/SEM DualBeam Helios NanoLab G3 UC

SEM
  • Schottky thermal field emitter
  • UC technology (monochromator) at low energies
  • Acceleration voltage: 0.35 - 30 kV
  • E-beam current: 0.8 pA up to 100 nA
  • 5x SE and BSE detectors
  • Retractable STEM detector
  • High performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE)
  • Max. electron beam resolution @ optimum WD and 15 kV: 0.6 nm
  • QuickLok ambient temperature airlock for vacuum transfer

FIB
  • Gallium ion source
  • Acceleration voltage: 0.5 - 30 kV
  • Ion beam current: 0.1 pA up to 65 nA
  • Ion beam resolution @ coincident point and 30 kV: 4.0 nm
  • GIS (Gas Injection System): SiO2, C and Pt deposition
  • EasyLift™ In situ lift-out micromanipulator

FEI Quanta 200 FEG

FEI Quanta 200 FEG

  • Field Emission Gun
  • acceleration voltages from 0.5 kV to 30 kV
  • max. resolution: 1.4 nm
  • Secondary Electron detector
  • Back Scattered Electron detector (SSD)
  • Scanning Transmission Electron Microscopy detector
  • Energy Dispersive X-ray detector (Genesis 4000)
  • in-situ SEM in gas atmosphere
  • mass flow controllers
  • Pfeiffer mass spectrometer
  • three imaging modes - high vacuum, low vacuum (0.1~2 mbar) and ESEM (up to 30 mbar)
  • gaseous SE and BSE detectors

STOE STADI P transmission diffractometer

STOE STADI P transmission diffractometer

  • Cu anode
  • Primary Ge(111) monochromator
  • Dectris MYTHEN 1K position sensitve microstrip solid-state detector
  • Auto sampler

STOE STADI P transmission diffractometer

STOE STADI P transmission diffractometer

  • Mo anode
  • Ge monochromator
  • Dectris MYTHEN 2 1K detector
  • In-situ HT2 high temperature chamber with quartz capillary
  • Gas supply system with Bronkhorst mass flow controllers
  • Online gas analysis with Pfeiffer quadrupole mass spectrometer

STOE Bragg-Brentano Theta/Theta diffractometer

STOE Bragg-Brentano Theta/Theta diffractometer

  • Cu anode
  • Secondary graphite monochromator & scintillation detector
  • Alternatively: Ni filter & Dectris MYTHEN 1K position sensitve microstrip solid-state detector
  • Anton Paar XRK900 high-temperature diffraction chamber
  • Gas supply system with Bronkhorst mass flow controllers
  • Online gas analysis with Pfeiffer OmniStar quadrupole mass spectrometer

Bruker D8 Advance II Bragg-Brentano Theta/Theta diffractometer

Bruker D8 Advance II Bragg-Brentano Theta/Theta diffractometer

  • Cu anode
  • Ni filter
  • LynxEye position sensitve microstrip solid-state detector

Bruker D8 Advance Davinci Theta/Theta diffractometer

Bruker D8 Advance Davinci Theta/Theta diffractometer

  • Parallel beam geometry
  • Cu anode
  • Ni filter
  • LynxEye position sensitve microstrip solid-state detector
  • Compact Eulerian cradle or motorized xyz sample stage
  • TC Reflectometry chamber for in situ high temperature XRR and GIXRD
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