Systems Metrology at ZEISS Semiconductor Manufacturing Technology
- MP Department Seminar
- Date: Sep 5, 2024
- Time: 09:30 AM - 10:30 AM (Local Time Germany)
- Speaker: Dr. Maximilian Doppelbauer
- ZEISS Semiconductor Manufacturing Technology (SMT)
- Location: MP Communication Room, C 1.11
- Room: Seminar Room
- Host: Department of Molecular Physics
- Contact: meijer@fhi-berlin.mpg.de
Precise optics produced by ZEISS Semiconductor Manufacturing Technology (SMT) are a centerpiece of ASML photolithography machines. These tools are indispensable for digitalization: over 80% of today’s microchips are manufactured on ASML wafer steppers and scanners.
ZEISS’ core competencies are optics design, manufacturing, and metrology. The latter is crucial to ensure constant quality and delivery of products that meet the chipmakers’ specifications. Since nanometer-sized structures are printed on microchips, the lithography optics have picometer-level requirements on e.g. wavefront aberrations.
I will present ZEISS’ contribution to further driving Moore’s law, give an introduction on wavefront metrology of DUV and EUV optics, and talk about the transition from academia to industry.